Stover, H. Optical Microlithography III: Technology for the Next Decade. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Stover, Harry. Optical Microlithography III: Technology for the Next Decade. SPIE Digital Library.
Citatione MLA (9a ed.)Stover, Harry. Optical Microlithography III: Technology for the Next Decade. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.