Wagner, A. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.
Chicago Style (17. basım) AtıfWagner, Alfred. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.
MLA (9th ed.) AtıfWagner, Alfred. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.
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