Wagner, A. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.
Čikaški stil citiranja (17. izdanje)Wagner, Alfred. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.
MLA način citiranja (9. izdanje)Wagner, Alfred. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.
Upozorenje: Ovi citati možda nisu uvijek 100% točni.