Wagner, A. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Wagner, Alfred. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.
Tohutoro MLA (9th ed.)Wagner, Alfred. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III. SPIE Digital Library.
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