APA (7th ed.) Citation

Nyyssonen, D. Integrated Circuit Metrology II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Nyyssonen, Diana. Integrated Circuit Metrology II. SPIE Digital Library.

MLA (9th ed.) Citation

Nyyssonen, Diana. Integrated Circuit Metrology II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.