Blais, P. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV. SPIE Digital Library.
Cita Chicago (17th ed.)Blais, Phillip. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV. SPIE Digital Library.
Cita MLA (9th ed.)Blais, Phillip. Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV. SPIE Digital Library.
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