Stover, H. Optical Microlithography IV. SPIE Digital Library.
Cita Chicago (17th ed.)Stover, Harry. Optical Microlithography IV. SPIE Digital Library.
Cita MLA (9th ed.)Stover, Harry. Optical Microlithography IV. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.