APA (7th ed.) Citation

Thompson, L. Advances in Resist Technology and Processing II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Thompson, Larry. Advances in Resist Technology and Processing II. SPIE Digital Library.

MLA (9th ed.) Citation

Thompson, Larry. Advances in Resist Technology and Processing II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.