APA (7th ed.) Citation

Willson, C. G. Advances in Resist Technology and Processing III. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Willson, C. Grant. Advances in Resist Technology and Processing III. SPIE Digital Library.

MLA (9th ed.) Citation

Willson, C. Grant. Advances in Resist Technology and Processing III. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.