Blais, P. Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V. SPIE Digital Library.
Chicago Style (17th ed.) CitationBlais, Phillip. Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V. SPIE Digital Library.
MLA (9th ed.) CitationBlais, Phillip. Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V. SPIE Digital Library.
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