Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V
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| Formato: | Electrónico eBook |
| Idioma: | inglés |
| Publicado: |
SPIE Digital Library,
6/30/86
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| Subjects: | |
| Acceso en liña: | Full text available on Research4Life (SPIE Digital Library) |
| descrición da copia: | <strong>On-Campus Access Only (IP based access)</strong> |
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| Descrición Física: | 1 online resource |
| Formato: | Mode of access: Internet |
| ISBN: | 9780892526673 |
| Acceso: | Electronic access restricted to authorized AUW faculty, staff and students |