APA (7th ed.) Citation

Monahan, K. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Monahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.

MLA (9th ed.) Citation

Monahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.

Advarsel: Disse citationer er muligvist ikke 100% nøjagtige.