Cita APA (7a ed.)

Monahan, K. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.

Cita Chicago Style (17a ed.)

Monahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.

Cita MLA (9a ed.)

Monahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.

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