Monahan, K. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
Lua i Stíl Chicago (17ú heag.)Monahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
Lua MLA (9ú heag.)Monahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
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