Monahan, K. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
शिकागो शैली (17वां संस्करण) प्रशस्ति पत्रMonahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
एमएलए (9वां संस्करण) प्रशस्ति पत्रMonahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
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