Monahan, K. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
Čikaški stil citiranja (17. izdanje)Monahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
MLA način citiranja (9. izdanje)Monahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
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