Monahan, K. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
Chicago Style (17. basım) AtıfMonahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
MLA (9th ed.) AtıfMonahan, Kevin. Integrated Circuit Metrology, Inspection, & Process Control. SPIE Digital Library.
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