Weck, M. Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Weck, Manfred. Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications. SPIE Digital Library.
Tohutoro MLA (9th ed.)Weck, Manfred. Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications. SPIE Digital Library.
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