Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications

Bibliographic Details
Other Authors: Weck, Manfred
Format: Electronic eBook
Language:English
Published: SPIE Digital Library, 1/11/87
Subjects:
Online Access:Full text available on Research4Life (SPIE Digital Library)
Description
Item Description:<strong>On-Campus Access Only (IP based access)</strong>
Physical Description:1 online resource
Format:Mode of access: Internet
ISBN:9780892528387
Access:Electronic access restricted to authorized AUW faculty, staff and students