Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications

Xehetasun bibliografikoak
Beste egile batzuk: Weck, Manfred
Formatua: Baliabide elektronikoa eBook
Hizkuntza:ingelesa
Argitaratua: SPIE Digital Library, 1/11/87
Gaiak:
Sarrera elektronikoa:Full text available on Research4Life (SPIE Digital Library)
Deskribapena
Alearen deskribapena:<strong>On-Campus Access Only (IP based access)</strong>
Deskribapen fisikoa:1 online resource
Formatua:Mode of access: Internet
ISBN:9780892528387
Sartu:Electronic access restricted to authorized AUW faculty, staff and students