Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications

Bibliografiske detaljer
Andre forfattere: Weck, Manfred
Format: Electronisk eBog
Sprog:engelsk
Udgivet: SPIE Digital Library, 1/11/87
Fag:
Online adgang:Full text available on Research4Life (SPIE Digital Library)

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