Stover, H. Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Stover, Harry. Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection. SPIE Digital Library.
Tohutoro MLA (9th ed.)Stover, Harry. Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection. SPIE Digital Library.
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