Stover, H. Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Stover, Harry. Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection. SPIE Digital Library.
Citatione MLA (9a ed.)Stover, Harry. Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.