Monahan, K. Integrated Circuit Metrology, Inspection, and Process Control II. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Monahan, Kevin. Integrated Circuit Metrology, Inspection, and Process Control II. SPIE Digital Library.
Citatione MLA (9a ed.)Monahan, Kevin. Integrated Circuit Metrology, Inspection, and Process Control II. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.