Yanof, A. Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Yanof, Arnold. Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII. SPIE Digital Library.
Citatione MLA (9a ed.)Yanof, Arnold. Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.