Yanof, A. Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII. SPIE Digital Library.
Chicago Style (17th ed.) CitationYanof, Arnold. Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII. SPIE Digital Library.
MLA (9th ed.) CitationYanof, Arnold. Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII. SPIE Digital Library.
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