APA (7th ed.) Zitazioa

Panning, E. Extreme Ultraviolet (EUV) Lithography VII. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Panning, Eric. Extreme Ultraviolet (EUV) Lithography VII. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Panning, Eric. Extreme Ultraviolet (EUV) Lithography VII. SPIE Digital Library.

Kontuz: berrikusi erreferentzia hauek erabili aurretik.