Lua APA (7ú heag.)

Panning, E. Extreme Ultraviolet (EUV) Lithography VII. SPIE Digital Library.

Lua i Stíl Chicago (17ú heag.)

Panning, Eric. Extreme Ultraviolet (EUV) Lithography VII. SPIE Digital Library.

Lua MLA (9ú heag.)

Panning, Eric. Extreme Ultraviolet (EUV) Lithography VII. SPIE Digital Library.

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