APA (7th ed.) Zitazioa

Sanchez, M. Metrology, Inspection, and Process Control for Microlithography XXX. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Sanchez, Martha. Metrology, Inspection, and Process Control for Microlithography XXX. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Sanchez, Martha. Metrology, Inspection, and Process Control for Microlithography XXX. SPIE Digital Library.

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