Cita APA

Erdmann, A. Optical Microlithography XXIX. SPIE Digital Library.

Citación estilo Chicago

Erdmann, Andreas. Optical Microlithography XXIX. SPIE Digital Library.

Cita MLA

Erdmann, Andreas. Optical Microlithography XXIX. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.