Cita APA

Lin, Q. Advanced Etch Technology for Nanopatterning V. SPIE Digital Library.

Citación estilo Chicago

Lin, Qinghuang. Advanced Etch Technology for Nanopatterning V. SPIE Digital Library.

Cita MLA

Lin, Qinghuang. Advanced Etch Technology for Nanopatterning V. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.