Lin, Q. Advanced Etch Technology for Nanopatterning V. SPIE Digital Library.
Chicago Style (17. basım) AtıfLin, Qinghuang. Advanced Etch Technology for Nanopatterning V. SPIE Digital Library.
MLA (9th ed.) AtıfLin, Qinghuang. Advanced Etch Technology for Nanopatterning V. SPIE Digital Library.
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