Yoshioka, N. Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Citação norma ChicagoYoshioka, Nobuyuki. Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Citação norma MLAYoshioka, Nobuyuki. Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Nota: a formatação da citação pode não corresponder 100% ao definido pela respectiva norma.