APA (7th ed.) Zitazioa

Behringer, U. 32nd European Mask and Lithography Conference. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Behringer, Uwe. 32nd European Mask and Lithography Conference. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Behringer, Uwe. 32nd European Mask and Lithography Conference. SPIE Digital Library.

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