APA (7th ed.) Citation

Goldberg, K. Extreme Ultraviolet (EUV) Lithography IX. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Goldberg, Kenneth. Extreme Ultraviolet (EUV) Lithography IX. SPIE Digital Library.

MLA (9th ed.) Citation

Goldberg, Kenneth. Extreme Ultraviolet (EUV) Lithography IX. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.