APA (7. basım) Alıntı

Ukraintsev, V. A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.

Chicago Style (17. basım) Atıf

Ukraintsev, Vladimir A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.

MLA (9th ed.) Atıf

Ukraintsev, Vladimir A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.

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