APA (7th ed.) Citation

Ukraintsev, V. A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Ukraintsev, Vladimir A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.

MLA (9th ed.) Citation

Ukraintsev, Vladimir A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.

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