Ukraintsev, V. A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.
Chicago-viite (17. p.)Ukraintsev, Vladimir A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.
MLA-viite (9. p.)Ukraintsev, Vladimir A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.
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