APA (7e ed.) Bronvermelding

Ukraintsev, V. A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.

Chicago (17e ed.) Bronvermelding

Ukraintsev, Vladimir A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.

MLA (9e ed.) Bronvermelding

Ukraintsev, Vladimir A. Metrology, Inspection, and Process Control for Microlithography XXXII. SPIE Digital Library.

Let op: Deze citaties zijn niet altijd 100% accuraat.