APA (7th ed.) Citation

Kye, J. Optical Microlithography XXXI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Kye, Jongwook. Optical Microlithography XXXI. SPIE Digital Library.

MLA (9th ed.) Citation

Kye, Jongwook. Optical Microlithography XXXI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.