Cita APA

Engelmann, S. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.

Citación estilo Chicago

Engelmann, Sebastian. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.

Cita MLA

Engelmann, Sebastian. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.