Engelmann, S. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.
Cita Chicago Style (17a ed.)Engelmann, Sebastian. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.
Cita MLA (9a ed.)Engelmann, Sebastian. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.
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