Engelmann, S. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.
Chicagoスタイル(17版)引用形式Engelmann, Sebastian. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.
MLA(9版)引用形式Engelmann, Sebastian. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.
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