Engelmann, S. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.
Chicago Style (17. basım) AtıfEngelmann, Sebastian. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.
MLA (9th ed.) AtıfEngelmann, Sebastian. Advanced Etch Technology for Nanopatterning VII. SPIE Digital Library.
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