Advanced Etch Technology for Nanopatterning VII

Xehetasun bibliografikoak
Beste egile batzuk: Engelmann, Sebastian
Formatua: Baliabide elektronikoa eBook
Hizkuntza:ingelesa
Argitaratua: SPIE Digital Library, 1/1/18
Gaiak:
Sarrera elektronikoa:Full text available on Research4Life (SPIE Digital Library)
Deskribapena
Alearen deskribapena:<strong>On-Campus Access Only (IP based access)</strong>
Deskribapen fisikoa:1 online resource
Formatua:Mode of access: Internet
ISBN:9781510616707
9781510616714
Sartu:Electronic access restricted to authorized AUW faculty, staff and students