APA (7th ed.) Citation

Bakshi, V. EUV Lithography, Second Edition. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Bakshi, Vivek. EUV Lithography, Second Edition. SPIE Digital Library.

MLA (9th ed.) Citation

Bakshi, Vivek. EUV Lithography, Second Edition. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.