Takehisa, K. Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Cita Chicago Style (17a ed.)Takehisa, Kiwamu. Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
Cita MLA (9a ed.)Takehisa, Kiwamu. Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology. SPIE Digital Library.
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