Behringer, U. 29th European Mask and Lithography Conference. SPIE Digital Library.
Chicago Style (17th ed.) ZitazioaBehringer, Uwe. 29th European Mask and Lithography Conference. SPIE Digital Library.
MLA (9th ed.) ZitazioaBehringer, Uwe. 29th European Mask and Lithography Conference. SPIE Digital Library.
Kontuz: berrikusi erreferentzia hauek erabili aurretik.