APA (7th ed.) Zitazioa

Rai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Rai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Rai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE Digital Library.