Maher, M. A. Micromachining and Microfabrication Process Technology XIX. SPIE Digital Library.
Chicago Style (17. basım) AtıfMaher, Mary Ann. Micromachining and Microfabrication Process Technology XIX. SPIE Digital Library.
MLA (9th ed.) AtıfMaher, Mary Ann. Micromachining and Microfabrication Process Technology XIX. SPIE Digital Library.
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